3200-1001 ( 3 หน วยกิต ชั่วโมง / สัปดาห ) 3 หมวดวิชาทักษะ ...
400 800 1200 1600 2000 2400 2800 3200 3600 4000 - CHERIC
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Transcript of 400 800 1200 1600 2000 2400 2800 3200 3600 4000 - CHERIC
B u b b ler
P lasm a G en erator
L oad C ou p ler
C oolin g w ater
E lectord e
E xh au st
A r gas
E lectrod e
D isch arge area
C on vectron gau ge
C on n ector
H old er
Wavenumber [cm-1]
400 800 1200 1600 2000 2400 2800 3200 3600 4000
Abs
orba
nce
350 watt
400 watt
450 watt
500 watt
Wavenumber [cm-1]
400 600 800 1000 1200 1400 1600 1800 2000
Abs
orba
nce
0.0
0.2
0.4
0.6
0.8
1.0
350 watt400 watt450 watt500 watt
Wavenumber [cm-1]
100 200 300 400 500 600 700 800 900
Inte
nsit
y
0
5000
10000
15000
20000
A A A A
350 watt
400 watt
450 watt
500 watt
Wavenumber [cm-1]
100 200 300 400 500 600 700 800 900
Inte
nsit
y
0.0
3.0e+4
6.0e+4
9.0e+4
1.2e+5
1.5e+5
350 watt
400 watt
500 watt
450 watt
A
A
A
A
R R
R
Wavenumber [cm-1]
100 200 300 400 500 600 700 800 900
Inte
nsit
y
0
10000
20000
30000
40000
R
R R
350 watt
400 watt
450 watt500 watt
Diffraction angle, 2θ
0 10 20 30 40 50 60 70 80 90 100
Inte
nsit
y
0
200
400
600
800
1000
A
350 watt
400 watt
450 watt
500 wattAA
A
A A
Diffraction angle, 2θ
0 10 20 30 40 50 60 70 80 90 100
Inte
nsit
y
0
200
400
600
800
1000R
A
350 watt
400 watt
450 watt
500 wattR A
R
R
R
A R
A
A
R
R
A
R
Diffraction angle, 2θ
0 10 20 30 40 50 60 70 80 90 100
Inte
nsit
y
0
200
400
600
800
1000
500 watt
450 watt
400 watt
350 watt
R
RR
R
R
R
R
R
RF power [watt]
350 400 450 500
Cry
stal
lite
size
[nm
]
0
20
40
60
80
100
500 oC700 oC900 oC
RF power [watt]
350 400 450 500
Ban
d ga
p [e
V]
2.0
2.5
3.0
3.5
4.0
Crystallite size [nm]
10 20 30 40 50 60 70 80
Ban
d ga
p [e
V]
0
1
2
3
4
5
500 oC700 oC900 oC
