Microscopia 3D (WLI) Caracterizao da Rugosidade de Superfcie

04/07/2018 2 Bruker Confidential

Pastilha de freio

aumento de 5x.

Representao em escala de cores

04/07/2018 3 Bruker Confidential

Desgaste

04.07.2018 4

perda de massa da superfcie de um material slido por interao mecnica com outro corpo em contato

Desgaste = Textura de Superfcie + Movimento + Presso/Calor

Acabamento de superfcies

04.07.2018 5

Processos mecnicos com remoo de material Processos qumicos e eletroqumicos

Recobrimentos

Esttica

Liberao ou introduo de esforos mecnicos

Nvel de limpeza e esterilidade

Propriedades mecnicas de superfcie

Proteo contra a corroso

Rugosidade

Tolerncias dimensionais de alta preciso

Textura da superfcie

04.07.2018 6

Forma Ondulao Rugosidade

Por que Microscpios pticos 3D?

MEMS

Eletronica

Orthopedics

Metrologia de

texturas

Microscpios pticos 3D

proporcionam

Metrologia rpida e precisa

No-contato, no-destrutiva

Mais de 1000 anlises

Estvel

Dados independentes de operador

04.07.2018 8

Aplicaes

Pesquisa e Desenvolvimento

Quantificar texturas

Quantificar desgaste

Desenvolvimento de Processos

Definir processos de fabricao

Design para alto desempenho

Produo

Garantir qualidade de produto

Monitorar processos de fabricao

Anlise de Qualidade

Investigao de falhas

Design para maior vida til

Setor Automotivo

Engrenagens

Rolamentos e vedaes

Eixos de comando de vlvulas

Setor Mdico

Implantes

Femorais

Coluna

Quadril

Endoprteses aorticas

Setor Aerospacial

Lminas de turbinas

Engrenagens

Rolamentos e vedaes

3D Microscopy - Two Modes Address Rough and Smooth Samples

7/4/2018 9

Phase Shifting

Interferometry PSI

- Green LED

White Light Interferometry WLI

- White HBLED

3D Microscopy - Two Modes Address Rough and Smooth Samples

Vertical resolution ~3 nm

Steps or surface variations up to 10 mm

Surfaces with rough/steep surfaces

Vertical resolution

11

Testando Superfcies Planas

O espelho de referncia realmente plano?

Franjas

- Visualmente aparenta ser perfeitamente

plano.

Mapa Fase

- Revela que as frentes de onda no so perfeitamente planas.

Aqui a rugosidade pico-vale est

na ordem de poucos nm.

12

Principles of PSI Operation

The fringes are shifted by fringe/4

Resultant arrays of intensity solved for Phase.

Phase is converted to surface height.

13

Is my sample smooth? Is the rms less than 30nm?

Visual assessment Is my sample shiny?

Does my sample have steps? Are they less than 140nm?

Can my sample be measured with PSI mode?

No problem measuring even 1nm steps

http://www.google.com/url?sa=i&source=images&cd=&cad=rja&docid=WGH7OqeSMV40lM&tbnid=PziujF5h4PYuIM:&ved=0CAgQjRwwAA&url=http://vjones9.blogspot.com/2010/10/public-art.html&ei=UPPHUa-XL_Ho0wGKxYDgAQ&psig=AFQjCNH66xVudmRmWOt55O4xWufkcAkQaw&ust=1372144848815033

VSI

Varredura ptica 3D Medio de um degrau

Amostra com um degrau

7/4/2018 Bruker Confidential 14

WLIM 3D Optical Microscope Key Point Sharp Coherence Signal, Sharp at All Magnifications

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Practical Implication: Highest accuracy data on areas

of interest obtained fastest at lowest magnifications

Great where a large area with good resolution is

required, speed is critical

7/4/2018 16

Distncia Transversal

Distncia de Avaliao

Distncia de Amostragem

Perfil de Rugosidade Aps Remoo Forma &

Ondulao

Tradicionalmente obtida via perfilmetro de contato

Porque Ra?...Padro ......Limites da tecnologia de 1930...

Metrologia 2D de Superfcie Rugosidade Ra ainda padro

7/4/2018 17

Peaks/Valleys .. Rp,Rv, Rt, Rz, Pc.... (e.g. Stylus X Rp)

Rp

Rv

Rp = Highest Point From Mean Line

Rv=Lowest Point from Mean Line

Rt = Rp - Rv = Peak to Valley

Rpi = Highest Peak from mean line in ith sampling length

Rti = Highest - Lowest points from mean line in ith Sampling length Peak to Valley

Rpm= Average of all Rpi

Rmax = Maximum Rti over evaluation length

Metrologia 2D de Superfcie Parmetros de Amplitude

Metrologia 2D de Superfcie Parmetros Estatsticos

7/4/2018 18

Clculo dos momentos da distribuio:

Rq = RMS, =

Rsk = Skew , Skewness =

Rku = Kurtosis =

LdxxZ

LqR

0

)(1 2

dxL

xZLRq

skR

0

)(33

1

dxL

xZLRq

kuR

0

)(44

1

Parmetros muito teis e conhecidos

Porm no informam sobre a estrutura espacial

04.07.2018 19

Pastilhas de freio Controle de Qualidade

Processo similar resultou em texturas diferentes

Uso de parmetros 3D proporciona oportunidade de aprimorar o controle de rudo e vibrao

Ra dentro da espec. Resultado: ruidoso

Ra dentro da espec. Resultado: silencioso

Dois discos possuam Ra dentro das especificaes, mas um apresentava rudo, enquanto outro no.

2D and 3D Surface Texture Analyses Standardization for Best Correlation

7/4/2018 20

2D amplitude and statistical parameters are great metrology tools, but do not provide structure/spatial information

3D areal (S-parameters) have been developed to take advantage of computational power and describe structure

Structural information has been shown to relate to functional surface performance (shafts, friction plates, seals, etc.)

The analyses include some math (e.g., filtering) which warrants a brief introduction before describing the 3D parameters in detail

7/4/2018 21

3D Surface Texture Metrology Brief Overview/History

1930s First 2D instruments for texture analogue, charts etc.

1960s Digital Computers parameter development 3D machines

1968 The Properties and Metrology of Engineering Surfaces U. of Oxford.

1979 1st of Triennial International Conferences

1990s Workshops indicating a need to standardize 3D parameters

2000s SurfStand, AutoSurf, CalStandNew ISO standard WG16ISO/DIS 25178-2

How can we get spatial

information in addition to

2D like information?

7/4/2018 22

Roughness 2D and 3D Descriptions: Well DefinedBut No Spatial Information

X

Y Z Surface Roughness, Ra (Sa) is the average of the absolute

value of profile heights over a given length (area).

dxdyyxZA

S

LxLy

a 00

),(1

L

dxxZL

R

L

a 0

)(1

2D

3D

Surface Texture (Surface Roughness, Waviness and Lay)

ANSI/ASME B46.1, 2009, American Society of Mechanical Engineers, NY, New York 10017.

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Ao Carbono 1060

Amostra Cupom padro estudos de corroso

Amostra rea corroda aumento de 2,8X

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Amostra rea no corroda aumento de 2,8X

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Amostra comparao aumento de 2,8X

7/4/2018 26 Bruker Confidential

regio

sem corroso

regio

com corroso

Parmetros de rugosidade 3D

so uma ordem de magnitude

maiores na rea corroda

Mesma escala vertical:

7/4/2018 26 Bruker Confidential

7/4/2018 27

Texture and Roughness: Surfaces Have Different Characteristics

These two surfaces have identical Ra (Sa)

Surfaces are different functionally

3D areal parameters (S-parameters) have been developed to

capture the differences in a quantifiable way

7/4/2018 28

3D Surface Texture Parameters Height Parameters (Sa, Sq)

Sa: Surface Average Roughness

Sq: Surface RMS Roughness

Both A and B have:

Sa = 16.03nm and Sq= 25.4nm

7/4/2018 29

Clutch Separator/Friction Plate Example Sa, Sbi, Sci, Svi Metrics

Sa = 1.2 um

Sbi=0.70

Sci=1.31

Svi =0.12

Sa = 4.2um

Sbi=1.43

Sci=0.46

Svi =0.23

Separator Plate Friction Plate

7/4/2018 30

Wear of Cylinder Bore Worn Doesnt Mean Broken!

Sbi 0.69

Sci 1.29

Svi 0.15

Sm 2.5 x 10-5

Sc 8.0 x 10-4

Sv 1.1 x 10-4

Unworn Bore Worn Bore

Sbi 0.70

Sci 1.32

Svi 0.11

Sm 8.3 x 10-6

Sc 1.5 x 10-4

Sv 1.8 x 10-5

1 mm

Note similar functional surface parameters for both cases

7/4/2018 31

Shaft- Unworn Sa 368nm

Sds 1130 /mm2

Ssc 49 mm-1 (radii 20mm)

Sa 769 nm

Sds 247 /mm2

Ssc 6 mm-1 (radii 166 mm)

Shaft- worn

600 mm

Sealing Surface Example Sds/Ssc monitored for failure (leak) prediction

Superfcie de alumnio Imagem individual - aumento de 5X

7/4/2018 32 Bruker Confidential

Superfcie de alumnio Imagem individual