MEMS Notes - Akshansh

88

description

Introduction, Molecular theory of matter, scaling, mems based devices, acoustic wave, biomedical, chemical, optical microsensors, silicon, pvd, cvd, epitaxy, bulk micromanufacturing, mechanics of slender solids, fem, rf mems switches, mircro relays, thermo fluid engineering, design considerations, microsystems packaging, microrobotics

Transcript of MEMS Notes - Akshansh

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